Micro Mass Spectrometry

We are also investigating the prospects of shrinking the size of conventional mass spectrometry by several orders of magnitude. Specifically we have been experimentally exploring the reduction in size of Paul-type ion trap mass analyzers and assessing their performance. Our current efforts involve miniaturization of Paul traps by microfabricating the ion traps in silicon using deep reactive ion etching. The device shown in the image is an array of 808 100 µm ion traps. Advantages of the microfabricated traps are lower drive voltages, reducing the trap volume and footprint while maintaining sensitivity , and operation at unprecedented high pressures (~1 mbar). Microscale ion trap MS devices that are a factor of 40 smaller than conventional scale have been operated with no loss in mass resolving power. Smaller mass analyzers may also allow operation at lower ion mean-free path (high pressures). Miniature mass spectrometers have application to problems such as environmental monitoring, chemical process control, and high-throughput laboratory analysis.